09184055 is referenced by 82 patents and cites 739 patents.

Systems, chambers, and processes are provided for controlling process defects caused by moisture contamination. The systems may provide configurations for chambers to perform multiple operations in a vacuum or controlled environment. The chambers may include configurations to provide additional processing capabilities in combination chamber designs. The methods may provide for the limiting, prevention, and correction of aging defects that may be caused as a result of etching processes performed by system tools.

Title
Processing systems and methods for halide scavenging
Application Number
14/246952
Publication Number
9184055 (B2)
Application Date
April 7, 2014
Publication Date
November 10, 2015
Inventor
Randhir Thakur
Fremont
CA, US
Shankar Venkataraman
San Jose
CA, US
Dmitry Lubomirsky
Cupertino
CA, US
Nitin K Ingle
San Jose
CA, US
Jiayin Huang
Fremont
CA, US
Ching Mei Hsu
Stanford
CA, US
Zhijun Chen
San Jose
CA, US
Hiroshi Hamana
Hyogo
JP
Zihui Li
Santa Clara
CA, US
Xinglong Chen
San Jose
CA, US
Anchuan Wang
San Jose
CA, US
Agent
Kilpatrick Townsend & Stockton
Assignee
Applied Materials
CA, US
IPC
H01J 37/32
H01L 21/311
H01L 21/3213
H01L 21/683
H01L 21/3065
H01L 21/306
H01L 21/677
C23C 16/44
H01L 21/67
H01L 21/02
H01L 21/263
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