09081028 is referenced by 1 patents and cites 28 patents.

An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.

Title
Scanning probe microscope with improved feature location capabilities
Application Number
14/386511
Publication Number
9081028 (B2)
Application Date
March 19, 2013
Publication Date
July 14, 2015
Inventor
Charles Meyer
Goleta
CA, US
Agent
Boyle Fredrickson S C
Assignee
Bruker Nano
CA, US
IPC
B82Y 35/00
G01Q 60/38
G01Q 40/00
G01Q 30/02
G01Q 10/00
G01Q 60/30
G01Q 30/04
G01Q 10/04
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