09013675 is referenced by 22 patents and cites 58 patents.

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.

Title
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Application Number
13/364828
Publication Number
9013675 (B2)
Application Date
February 2, 2012
Publication Date
April 21, 2015
Inventor
Takeshi Okuyama
Yokohama
JP
Hiroyuki Nagasaka
Kumagaya
JP
Yasufumi Nishii
Kumagaya
JP
Agent
Oliff
Assignee
Nikon Corporation
JP
IPC
G03F 7/20
G03B 27/52
G03B 27/42
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