08776514 cites 58 patents.

A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.

Title
Electrothermal microactuator for large vertical displacement without tilt or lateral shift
Application Number
12/743499
Publication Number
8776514 (B2)
Application Date
December 15, 2008
Publication Date
July 15, 2014
Inventor
Huikai Xie
Gainesville
FL, US
Lei Wu
Gainesville
FL, US
Agent
Saliwanchik Lloyd & Eisenschenk
IPC
G02B 26/00
F01B 29/10
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