08755417 is referenced by 19 patents and cites 7 patents.

A method for producing light energy, where fundamental frequency laser energy is produced at a wavelength of from about 1,160 nanometers to about 1,170 nanometers. Portions of the fundamental frequency laser energy are combined to produce a second harmonic frequency laser energy using non-critical phase-matching in a LBO crystal. A portion of the fundamental frequency laser energy is combined with a portion of the second harmonic frequency laser energy to produce a third harmonic frequency laser energy. A portion of the second harmonic frequency laser energy is combined with the third harmonic frequency laser energy to produce a fifth harmonic frequency laser energy using non-critical phase-matching in a CLBO crystal. A portion of the fundamental frequency laser energy is combined with the fifth harmonic frequency laser energy to produce a sixth harmonic frequency laser energy using a CLBO crystal. The sixth harmonic frequency laser energy has a wavelength that is less than about two hundred nanometers.

Title
Coherent light generation below about two-hundred nanometers
Application Number
11/735967
Publication Number
8755417 (B1)
Application Date
April 16, 2007
Publication Date
June 17, 2014
Inventor
Vladimir L Dribinski
San Jose
CA, US
Agent
Rick Barnes
Luedeka Neely Group P C
Assignee
KLA Tencor Corporation
CA, US
IPC
H01S 3/10
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