08674717 is referenced by 2 patents and cites 36 patents.

A probe of the present invention includes a beam portion cantilevered by a holding portion, and a contact extending perpendicularly to and downward from a free end of the beam portion. An inner cut portion is formed on a fixed end side of the beam portion in a side portion of the contact, and an outer cut portion is formed on a free end side of the beam portion in a side portion of the contact, so that the outer cut portion and the inner cut portion are formed to bend the contact when the contact contacts an electrode of an object to be inspected at a predetermined contact pressure. According to the present invention, in inspection of electrical characteristics of the object to be inspected, suitable contact between the probe and the object to be inspected may be maintained and the durability of the probe may be improved.

Title
Cantilevered probe having a bending contact
Application Number
12/746252
Publication Number
8674717 (B2)
Application Date
November 5, 2008
Publication Date
March 18, 2014
Inventor
Toshihiro Yonezawa
Nirasaki
JP
Agent
Cantor Colburn
Assignee
Tokyo Electron
JP
IPC
G01R 1/067
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