08648125 cites 21 patents.

Disclosed is silsesquioxane resin composition that contains a free radical curable functional group that is stabilized with a hydrophilic inhibitor. The hydrophilic inhibitor that has the capability to scavenge free radicals such as ascorbic acid or salicylic acid is used to stabilize the resin. The resins are useful in semiconductor formation such as for anti-reflective coatings, hardmasks or photoresist layers.

Title
Stabilization of silsesquioxane resins
Application Number
13/513588
Publication Number
8648125 (B2)
Application Date
December 2, 2010
Publication Date
February 11, 2014
Inventor
Craig Rollin Yeakle
Midland
MI, US
Sheng Wang
Midland
MI, US
Kasumi Takeuchi
Midland
MI, US
Michael Robert Reiter
Midland
MI, US
Eric Scott Moyer
Midland
MI, US
Andrew MacMillan
Lombard
IL, US
Agent
Claude F Purchase
Sharon K Brady
Dow Corning
Assignee
Dow Corning Corporation
MI, US
IPC
C09K 3/00
C09D 183/00
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