08595859 is referenced by 1 patents and cites 4 patents.

A method for optically controlling an atomic force microscope (AFM) includes acquiring an optical image of a sample using an optical imaging device, identifying a feature of interest on the sample using the optical image, acquiring a high resolution AFM image of the sample using an AFM imaging device, the AFM imaging device comprising a cantilever having a tip, overlaying the AFM image with the optical image at the feature of interest, and positioning the probe tip over the feature of interest using the optical image.

Title
Controlling atomic force microscope using optical imaging
Application Number
13/249654
Publication Number
8595859 (B1)
Application Date
September 30, 2011
Publication Date
November 26, 2013
Inventor
Tianwei Jing
Tempe
AZ, US
Asger Iversen
Aalborg
DK
Christian Rankl
Linz
AT
Assignee
Agilent Technologies
CA, US
IPC
G01N 23/00
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