08574408 is referenced by 36 patents and cites 400 patents.

A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.

Title
Fluid recirculation system for use in vapor phase particle production system
Application Number
12/151765
Publication Number
8574408 (B2)
Application Date
May 8, 2008
Publication Date
November 5, 2013
Inventor
Fredrick P Layman
Carefree
AZ, US
Agent
Morrison & Foerster
Assignee
SDCmaterials
AZ, US
IPC
C22B 9/21
B01J 19/08
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