08564763 is referenced by 19 patents and cites 38 patents.

A substrate table is disclosed in which heaters are provided to account for a heat load which may be applied to the substrate. The heaters are grouped in segments to improve control. A temperature sensor per segment may be provided. The temperature sensor may be embedded in the substrate table.

Title
Lithographic apparatus and method
Application Number
12/436635
Publication Number
8564763 (B2)
Application Date
May 6, 2009
Publication Date
October 22, 2013
Inventor
Paula Steffens
Eindhoven
NL
Henricus Petrus Versteijnen
Hilvarenbeek
NL
Hendrikus Johannes Marinus Van Abeelen
Moergestel
NL
Wouterus Johannes Petrus Maria Maas
Boxtel
NL
Anko Jozef Cornelus Sijben
Uden
NL
Joost Jeroen Ottens
Veldhoven
NL
Frits Van der Meulen
Eindhoven
NL
Martinus Hendrikus Antonius Leenders
Rhoon
NL
Johannes Henricus Wilhelmus Jacobs
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/58
G03B 27/52
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