08547523 is referenced by 17 patents and cites 30 patents.

A fluid handling structure has a plurality of openings acting as a meniscus pinning system operating on the gas drag principle and a gas knife outwardly of the meniscus pinning system to break-up any film of liquid left behind. The separation between the gas knife and the meniscus pinning system is selected from the range of 1 mm to 5 mm. Desirably the underside of a barrier member in which the gas knife and the meniscus pinning system are provided is continuous, e.g. has no openings, between the gas knife and the meniscus pinning system.

Title
Fluid handling structure, lithographic apparatus and device manufacturing method
Application Number
12/785913
Publication Number
8547523 (B2)
Application Date
May 24, 2010
Publication Date
October 1, 2013
Inventor
Nicolaas Rudolf Kemper
Eindhoven
NL
Michel Riepen
Veldhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/52
G03B 27/42
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