08438927 is referenced by 3 patents and cites 50 patents.

A system and method for analyzing a sample is described. The system may include, for example, a light source and a scanning probe microscope probe. The light source may generate a coherent laser beam that is modulated by a waveform of a lower frequency. The modulated laser beam is absorbed by the sample causing thermally induced expansion and resulting in an excitation of acoustic waves. The probe is locally deployed near the sample and detects, in real time, perturbations in the excited acoustic waves to detect surface and buried structures of the sample.

Title
Scanning near field thermoelastic acoustic holography (SNFTAH)
Application Number
12/896282
Publication Number
8438927 (B2)
Application Date
October 1, 2010
Publication Date
May 14, 2013
Inventor
Vinayak P Dravid
Glenview
IL, US
Gajendra S Shekhawat
Arlington Heights
IL, US
Agent
McAndrews Held & Malloy
Assignee
Northwestern University
IL, US
IPC
G01N 29/04
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