08418934 is referenced by 9 patents and cites 30 patents.

A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

Title
System and method for miniaturization of synthetic jets
Application Number
12/198267
Publication Number
8418934 (B2)
Application Date
August 26, 2008
Publication Date
April 16, 2013
Inventor
Stanton Earl Weaver
Northville
NY, US
Mehmet Arik
Niskayuna
NY, US
Agent
Jean K Testa
Ziolkowski Patent Solutions Group SC
Assignee
General Electric Company
NY, US
IPC
B05B 1/08
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