08351018 is referenced by 10 patents and cites 60 patents.

A fluid handling structure is disclosed in which measures are taken to increase the speed at which meniscus breakdown occurs. Measures include the shape of a plurality of fluid extraction openings and the shape and density of a plurality of fluid supply openings in the fluid handling structure.

Title
Fluid handling structure, lithographic apparatus and device manufacturing method
Application Number
12/436626
Publication Number
8351018 (B2)
Application Date
May 6, 2009
Publication Date
January 8, 2013
Inventor
Arnold Jan Van Putten
Eindhoven
NL
Koen Steffens
Veldhoven
NL
Clemens Johannes Gerardus Van Den Dungen
Eindhoven
NL
Danny Maria Hubertus Philips
Son en Breugel
NL
Daniel Jozef Maria Direcks
Simpelveld
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/52
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