08292549 is referenced by 3 patents and cites 33 patents.

The substrate carrying device includes a carrying passage forming member forming a carrying passage along which a substrate is carried, exhaust grooves extending parallel to the carrying passage in the upper surface of the carrying passage forming member, a plurality of pairs each of right and left carrying gas flow grooves formed in the upper surface of the carrying passage forming member, inclined to a substrate carrying direction so as to approach the exhaust grooves from the right-hand side and the left-hand side of the exhaust grooves, respectively, and having inner ends joined to the exhaust grooves, respectively, and gas spouting pores formed near outer ends of the carrying gas flow grooves to spout a gas for causing the substrate to float and for creating substrate carrying gas flows flowing from the outer ends of the carrying gas flow grooves toward the inner ends of the carrying gas flow grooves.

Title
Substrate carrying device, substrate carrying method and computer-readable storage medium
Application Number
13/181867
Publication Number
8292549 (B2)
Application Date
July 13, 2011
Publication Date
October 23, 2012
Inventor
Naruaki Iida
Koshi
JP
Agent
Oblon Spivak McClelland Maier & Neustadt L
Assignee
Tokyo Electron
JP
IPC
B65G 53/00
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