08164815 is referenced by 4 patents and cites 440 patents.

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

Title
MEMS cavity-coating layers and methods
Application Number
12/795294
Publication Number
8164815 (B2)
Application Date
June 7, 2010
Publication Date
April 24, 2012
Inventor
David Heald
Solvang
CA, US
James Randolph Webster
San Jose
CA, US
Evgeni Gousev
Saratoga
CA, US
Bangalore R Natarajan
Cupertino
CA, US
Ana R Londergan
Santa Clara
CA, US
Agent
Knobbe Martens Olson & Bear
Assignee
Qualcomm Mems Technologies
CA, US
IPC
G02F 1/00
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