08134688 is referenced by 11 patents and cites 168 patents.

A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
Application Number
Publication Number
8134688 (B2)
Application Date
September 4, 2007
Publication Date
March 13, 2012
Yuichi Shibazaki
Oliff & Berridge
Nikon Corporation
G03B 27/74
G03B 27/54
G03B 27/42
G03B 27/32
G01B 11/00
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