08134685 is referenced by 28 patents and cites 44 patents.

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.

Title
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Application Number
12/76331
Publication Number
8134685 (B2)
Application Date
March 17, 2008
Publication Date
March 13, 2012
Inventor
Takeshi Okuyama
Yokohama
JP
Hiroyuki Nagasaka
Kumagaya
JP
Yasufumi Nishii
Kumagaya
JP
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G03B 27/52
G03B 27/42
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