08023248 is referenced by 95 patents and cites 5 patents.

An electrostatic chuck includes a dielectric layer 30 formed with an attraction and fix face onto which a plate member 10 is attracted and fixed, wherein the attraction and fix face of the dielectric layer 30 is formed with a plurality of projection parts 32 each with only a tip face abutting the plate member 10 formed as a flat face by grinding and formed with a coolant gas flow path 36 where a coolant gas flows is opened to the flat face of each of the projection parts 32.

Title
Electrostatic chuck
Application Number
12/714654
Publication Number
8023248 (B2)
Application Date
March 1, 2010
Publication Date
September 20, 2011
Inventor
Koki Tamagawa
Nagano
JP
Hiroshi Yonekura
Nagano
JP
Agent
Rankin Hill & Clark
Assignee
Shinko Electric
JP
IPC
H01T 23/00
H01L 21/683
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