08004651 is referenced by 28 patents and cites 40 patents.

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery part that suctions, through a porous member, at least part of the liquid that flows into the gap portion; and a second opening that is different from the first opening. The gap portion is open to the atmosphere through the second opening.

Title
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
Application Number
12/10162
Publication Number
8004651 (B2)
Application Date
January 22, 2008
Publication Date
August 23, 2011
Inventor
Hiroyuki Nagasaka
Kumagaya
JP
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G03B 27/52
G03B 27/42
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