07993081 is referenced by 2 patents and cites 31 patents.

A device capable of causing a substrate to float by a gas can suppress the consumption of a gas. The device includes a carrying passage along which a substrate is carried. The gas spouted through the gas spouting pores causes the substrate to float and creates gas flows in the carrying gas flow grooves to propel the substrate in a carrying direction. The carrying passage is divided with respect to the carrying direction into passage sections, and the spouting of the gas through groups of the gas spouting pores assigned respectively to the passage sections is controlled to suporess the consumption of the gas.

Title
Substrate carrying device, substrate carrying method and computer-readable storage medium
Application Number
11/616484
Publication Number
7993081 (B2)
Application Date
December 27, 2006
Publication Date
August 9, 2011
Inventor
Naruaki Iida
Koshi
JP
Agent
Oblon Spivak McClelland Maier & Neustadt L
Assignee
Tokyo Electron
JP
IPC
B65G 53/00
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