07981472 is referenced by 5 patents and cites 34 patents.

A method of introducing gasses through a gas distribution system into a reactor involves flowing the gasses through at least two distinct gas source orifice arrays displaced from one another along an axis defined by a gas flow direction from the gas source orifice arrays towards a work-piece. During different time intervals, a purge gas and different reactive precursors are flowed into the reactor from different ones of the gas source orifice arrays. One of the precursors may be associated with a soft saturating atomic layer deposition half reaction and another of the precursors associated with a strongly saturating atomic layer deposition half reaction. An upper one of the gas source orifice arrays may be a relatively planar gas orifice array.

Title
Methods of providing uniform gas delivery to a reactor
Application Number
12/553917
Publication Number
7981472 (B2)
Application Date
September 3, 2009
Publication Date
July 19, 2011
Inventor
Ana R Londergan
Santa Clara
CA, US
M Ziaul Karim
San Jose
CA, US
Jeremie J Dalton
San Jose
CA, US
Agent
SNR Denton US
Assignee
Aixtron
CA, US
IPC
C23C 16/455
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