07939438 cites 11 patents.

Methods of inhibiting background plating on semiconductor substrates using oxidizing agents are disclosed.

Title
Method of inhibiting background plating
Application Number
12/383013
Publication Number
7939438 (B2)
Application Date
March 19, 2009
Publication Date
May 10, 2011
Inventor
Carl J Colangelo
New Bedford
MA, US
David L Jacques
Northbridge
MA, US
Gary Hamm
Billerica
MA, US
Agent
John J Piskorski
Assignee
Rohm and Haas Electronic Materials
MA, US
IPC
H01L 21/42
H01L 21/26
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