07839485 is referenced by 25 patents and cites 102 patents.

Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
Application Number
Publication Number
7839485 (B2)
Application Date
January 19, 2007
Publication Date
November 23, 2010
Yuichi Shibazaki
Oliff & Berridge
Nikon Corporation
G01C 25/00
G01B 9/02
G01B 7/14
G03B 27/32
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