07828274 is referenced by 8 patents and cites 112 patents.

Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

Title
Method and apparatus to help promote contact of gas with vaporized material
Application Number
12/358723
Publication Number
7828274 (B2)
Application Date
January 23, 2009
Publication Date
November 9, 2010
Inventor
Ravi Laxman
San Jose
CA, US
Donn K Naito
Marble Falls
TX, US
Jeffrey I Banton
Burnet
TX, US
Scott L Battle
Cedar Park
TX, US
John N Gregg
Marble Falls
TX, US
Agent
Maggie Chappuis
Intellectual Property Technology Law
Vincent K Gustafson
Assignee
Advanced Technology Materials
CT, US
IPC
B01F 3/04
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