07804577 is referenced by 12 patents and cites 117 patents.

A barrier member is provided for use in immersion lithography. The barrier member includes an extractor assembly on a bottom surface configured to face the substrate. The extractor assembly includes a plate configured to split the space between a liquid removal device and the substrate in two such that a meniscus is formed in an upper channel between the liquid removal device and the plate and below the plate between the plate and the substrate.

Title
Lithographic apparatus
Application Number
11/391683
Publication Number
7804577 (B2)
Application Date
March 29, 2006
Publication Date
September 28, 2010
Inventor
Sergei Shulepov
Eindhoven
NL
Michel Riepen
Bergschenhoek
NL
Johannes Petrus Maria Smeulers
Zwijndrecht
NL
Marcel Beckers
Eindhoven
NL
Joost Jeroen Ottens
Veldhoven
NL
Nicolaas Rudolf Kemper
Eindhoven
NL
Nicolaas Ten Kate
Almkerk
NL
Martinus Hendrikus Antonius Leenders
Rotterdam
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Netherlands
NL
IPC
G03B 27/42
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