07770448 is referenced by 3 patents and cites 18 patents.

A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.

Title
Chemical storage device with integrated load cell
Application Number
11/458565
Publication Number
7770448 (B2)
Application Date
July 19, 2006
Publication Date
August 10, 2010
Inventor
Ravi Laxman
San Jose
CA, US
Benjamin J Jurcik Jr
Richardson
TX, US
Ashutosh Misra
Plano
TX, US
Agent
Patricia E McQueeney
Assignee
Air Liquide Electronics U S
TX, US
IPC
G01G 19/00
G01F 23/20
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