07733552 is referenced by 12 patents and cites 351 patents.

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

Title
MEMS cavity-coating layers and methods
Application Number
11/689430
Publication Number
7733552 (B2)
Application Date
March 21, 2007
Publication Date
June 8, 2010
Inventor
David Heald
Solvang
CA, US
James Randolph Webster
San Jose
CA, US
Evgeni Gousev
Saratoga
CA, US
Bangalore R Natarajan
Cupertino
CA, US
Ana R Londergan
Santa Clara
CA, US
Agent
Knobbe Martens Olson & Bear
Assignee
Qualcomm Mems Technologies
CA, US
IPC
G02F 1/00
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