07701550 is referenced by 23 patents and cites 252 patents.

A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Title
Lithographic apparatus and device manufacturing method
Application Number
10/921348
Publication Number
7701550 (B2)
Application Date
August 19, 2004
Publication Date
April 20, 2010
Inventor
Herman Vogel
Sandy Hook
CT, US
Johannes Petrus Maria Smeulers
Zwijndrecht
NL
Stefan Philip Christiaan Belfroid
Delft
NL
Martinus Cornelis Maria Verhagen
Valkenswaard
NL
Jan Gerard Cornelis Van Der Toorn
Eindhoven
NL
Franciscus Johannes Herman Maria Teunissen
Rotterdam
NL
Frits Van Der Meulen
Eindhoven
NL
Jeroen Johannes Sophia Maria Mertens
Duizel
NL
Nicolaas Ten Kate
Almkerk
NL
Christiaan Alexander Hoogendam
Westerhoven
NL
Roelof Frederik De Graaf
Veldhoven
NL
Sjoerd Nicolaas Lambertus Donders
Vught
NL
Henrikus Herman Marie Cox
Eindhoven
NL
Nicolaas Rudolf Kemper
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Holding
NL
ASML Netherlands
NL
IPC
G03B 27/52
G03B 27/42
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