07645675 is referenced by 6 patents and cites 83 patents.

A parallel plate capacitor formed in the back end of an integrated circuit employs conductive capacitor plates that are formed simultaneously with the other interconnects on that level of the back end (having the same material, thickness, etc). The capacitor plates are set into the interlevel dielectric using the same process as the other interconnects on that level of the back end (preferably dual damascene). Some versions of the capacitors have perforations in the plates and vertical conductive members connecting all plates of the same polarity, thereby increasing reliability, saving space and increasing the capacitive density compared with solid plates.

Title
Integrated parallel plate capacitors
Application Number
11/275544
Publication Number
7645675 (B2)
Application Date
January 13, 2006
Publication Date
January 12, 2010
Inventor
Anthony K Stamper
Essex Junction
VT, US
Zhong Xiang He
Essex Junction
VT, US
Michael D Gordon
Essex Jct
VT, US
Ebenezer E Eshun
Newburgh
NY, US
Hanyi Ding
Essex Junction
VT, US
Douglas D Coolbaugh
Highland
NY, US
Agent
Anthony J Canale
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/20
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