07626379 is referenced by 21 patents and cites 986 patents.

A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.

Title
Probe station having multiple enclosures
Application Number
11/977338
Publication Number
7626379 (B2)
Application Date
October 24, 2007
Publication Date
December 1, 2009
Inventor
R Mark Dougherty
Aloha
OR, US
Jeffrey A Hawkins
Portland
OR, US
Leonard A Hayden
Beaverton
OR, US
Ron A Peters
Tigard
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/28
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