07602470 is referenced by 13 patents and cites 264 patents.

A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

Title
Lithographic apparatus and device manufacturing method
Application Number
11/212921
Publication Number
7602470 (B2)
Application Date
August 29, 2005
Publication Date
October 13, 2009
Inventor
Herman Vogel
Sandy Hook
CT, US
Johannes Petrus Maria Smeulers
Zwijndrecht
NL
Stefan Philip Christiaan Belfroid
Delft
NL
Edwin Augustinus Matheus Van Gompel
Veldhoven
NL
Marco Polizzi
Eindhoven
NL
Martinus Cornelis Maria Verhagen
Valkenswaard
NL
Jan Gerard Cornelis Van Der Toorn
Eindhoven
NL
Franciscus Johannes Herman Maria Teunissen
Rotterdam
NL
Joost Jeroen Ottens
Veldhoven
NL
Frits Van Der Meulen
Eindhoven
NL
Jeroen Johannes Sophia Maria Mertens
Duizel
NL
Martinus Hendrikus Antonius Leenders
Rhoon
NL
Nicolaas Ten Kate
Almkerk
NL
Christian Alexander Hoogendam
Veldhoven
NL
Roelof Frederik De Graaf
Veldhoven
NL
Sjoerd Nicolaas Lambertus Donders
Vught
NL
Henrikus Herman Marie Cox
Eindhoven
NL
Nicolaas Rudolf Kemper
Eindhoven
NL
Agent
Pillsbury Winthrop Shaw Pittman
Assignee
ASML Holding
NL
ASML Netherlands
NL
IPC
G03B 27/52
G03B 27/42
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