07589822 is referenced by 57 patents and cites 228 patents.

When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.

Stage drive method and stage unit, exposure apparatus, and device manufacturing method
Application Number
Publication Number
7589822 (B2)
Application Date
February 2, 2004
Publication Date
September 15, 2009
Yuichi Shibazaki
Oliff & Berridge
Nikon Corporation
G03B 27/42
G03B 27/58
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