07581511 is referenced by 134 patents and cites 539 patents.

A reactor comprising an energy source, a plasma unit positioned relative to the energy source, and a processing vessel connected to the plasma unit. The energy source has a generator that produces a plasma energy and a transmitter to transmit the plasma energy. The plasma unit has a first portion or transmissive portion through which the plasma energy can propagate, a second portion or distributor portion having a plurality of outlets, and a chamber in fluid communication with the plurality of outlets. The chamber is generally between or within the first and second portions. The plasma energy can pass through at least the first portion and into the chamber to create a plasma in the chamber. The second portion can also be transmissive or opaque to the plasma energy. The processing vessel includes a workpiece holder across from the outlets of the second portion of the plasma unit.

Title
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
Application Number
10/683424
Publication Number
7581511 (B2)
Application Date
October 10, 2003
Publication Date
September 1, 2009
Inventor
Santiago R Rodriguez
Boise
ID, US
Allen P Mardian
Boise
ID, US
Agent
Perkins Coie
Assignee
Micron Technology
ID, US
IPC
H01L 21/306
C23F 1/00
C23C 16/00
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