07528048 is referenced by 4 patents and cites 5 patents.

Resistors that avoid the problems of miniaturization of semiconductor devices and a related method are disclosed. In one embodiment, a resistor includes a planar resistor material that extends vertically within at least one metal layer of a semiconductor device. In another embodiment, a resistor includes a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device. The two embodiments can be used alone or together. A related method for generating the resistors is also disclosed.

Title
Planar vertical resistor and bond pad resistor and related method
Application Number
11/954782
Publication Number
7528048 (B2)
Application Date
December 12, 2007
Publication Date
May 5, 2009
Inventor
Richard P Volant
New Fairfield
CT, US
Anthony K Stamper
Williston
VT, US
Kevin S Petrarca
Newburgh
NY, US
Jeffrey P Gambino
Westford
VT, US
Ebenezer E Eshun
Newburgh
NY, US
Daniel C Edelstein
White Plains
NY, US
Timothy J Dalton
Ridgefield
CT, US
Douglas D Coolbaugh
Essex Junction
VT, US
Agent
Lisa Jaklitsch
Hoffman Warnick
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/20
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