07485856 is referenced by 4 patents and cites 192 patents.

A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

Title
Scanning probe microscopy inspection and modification system
Application Number
11/411985
Publication Number
7485856 (B2)
Application Date
April 25, 2006
Publication Date
February 3, 2009
Inventor
Victor B Kley
Berkeley
CA, US
Agent
Townsend and Townsend and Crew
Assignee
General Nanotechnology
CA, US
IPC
G21K 7/00
G01N 23/00
View Original Source