07483120 is referenced by 76 patents and cites 27 patents.

A displacement measurement system, in particular for measuring the displacement of a substrate table in a lithographic apparatus relative to a reference frame is presented. The displacement measure system includes a plurality of displacement sensors mounted to the substrate table and a target associated with each displacement sensor mounted to the reference frame.

Title
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
Application Number
11/430196
Publication Number
7483120 (B2)
Application Date
May 9, 2006
Publication Date
January 27, 2009
Inventor
Harmen Klaas Van Der Schoot
Vught
NL
Engelbertus Antonius Fransiscus Van Der Pasch
Oirschot
NL
Erik Roelof Loopstra
Heeze
NL
Henrikus Herman Marie Cox
Eindhoven
NL
Bernardus Antonius Johannes Luttikhuis
Nuenen
NL
Agent
Sterne Kessler Goldstein & Fox P L L C
Assignee
ASML Netherlands
NL
IPC
G01B 11/14
G03B 27/58
G03B 27/42
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