07480891 is referenced by 158 patents and cites 9 patents.

An apparatus and method for improving image quality in a photolithographic process includes calculating a figure-of-demerit for a photolithographic mask function and then adjusting said photolithographic mask function to reduce the figure of demerit.

Title
Method and apparatus of model-based photomask synthesis
Application Number
11/203505
Publication Number
7480891 (B2)
Application Date
August 13, 2005
Publication Date
January 20, 2009
Inventor
Abdurrahman Sezginer
Los Gatos
CA, US
Agent
Sheppard Mullin Richter & Hampton
Assignee
Cadence Design Systems
CA, US
IPC
G06F 17/50
View Original Source