07477959 is referenced by 1 patents and cites 10 patents.

A photoresist system is disclosed. A graphical user interface of the system allows an operator to initiate a bottle switching operation, among other operations. Barcode data of a photoresist bottle is obtained by an equipment server from a controller. Photoresist data relating to the bottle is obtained by the equipment server from a database through a constraint server. The equipment server, preferably with assistance from the constraint server, determines whether the bottle contains appropriate photoresist for the semiconductor processing to be performed on semiconductor wafers. If the bottle contains appropriate photoresist, the equipment server, through the constraint server, stores the expiration date of the bottle and the batch identifier of the bottle, as indicated by the barcode data, in the database. If the bottle contains inappropriate photoresist, then the system acts to prevent the semiconductor processing of the semiconductor wafers with the inappropriate photoresist contained in the bottle.

Title
Photoresist system
Application Number
10/180352
Publication Number
7477959 (B2)
Application Date
June 26, 2002
Publication Date
January 13, 2009
Inventor
Fu Kai Yeh
Hsinchu
TW
Yenni Yang
Taichung
TW
Agent
Tung & Associates
Assignee
Taiwan Semiconductor Manufacturing
TW
IPC
G06F 19/00
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