07427868 is referenced by 23 patents and cites 844 patents.

A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.

Title
Active wafer probe
Application Number
11/19440
Publication Number
7427868 (B2)
Application Date
December 21, 2004
Publication Date
September 23, 2008
Inventor
K Reed Gleason
Portland
OR, US
Eric Strid
Portland
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/02
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