07416905 is referenced by 8 patents and cites 23 patents.

A magnetic data track used in a magnetic shift register memory system may be fabricated by forming a multilayered stack of alternating dielectric and/or silicon layers. A trench is etched in the multi-layer stack structure. A selective etching process is used to corrugate the walls of trench. A seed layer is applied to the walls and bottom of the trench; the seed layer is covered with a magnetic layer. The trench is filled with an insulating material. A patterned layer is applied and portions of insulating material exposed by the pattern are removed, forming holes. Magnetic material and seed layer exposed in holes is selectively removed. The holes are filled with insulating material and connecting leads are attached to data tracks.

Title
Method of fabricating a magnetic shift register
Application Number
11/252384
Publication Number
7416905 (B2)
Application Date
October 17, 2005
Publication Date
August 26, 2008
Inventor
Stuart S P Parkin
San Jose
CA, US
Tze chiang Chen
Yorktown Heights
NY, US
Agent
Shimokaji & Assoc P C
Assignee
International Busniess Machines Corporation
NY, US
IPC
H01L 21/00
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