07388217 is referenced by 234 patents and cites 16 patents.

In a particle-optical projection system a pattern is imaged onto a target by means of energetic electrically charged particles. The pattern is represented in a patterned beam of said charged particles emerging from the object plane through at least one cross-over; it is imaged into an image with a given size and distortion. To compensate for the Z-deviation of the image position from the actual positioning of the target (Z denotes an axial coordinate substantially parallel to the optical axis), without changing the size of the image, the system includes a position detector for measuring the Z-position of several locations of the target, and a controller for calculating modifications of selected lens parameters of the final particle-optical lens and controlling said lens parameters according to said modifications.

Title
Particle-optical projection system
Application Number
11/700468
Publication Number
7388217 (B2)
Application Date
January 31, 2007
Publication Date
June 17, 2008
Inventor
Gerhard Stengl
Wernberg
AT
Elmar Platzgummer
Vienna
AT
Robert Nowak
Vienna
AT
Alfred Chalupka
Vienna
AT
Gertraud Lammer
Vienna
AT
Herbert Buschbeck
Vienna
AT
Agent
RatnerPrestia
Assignee
IMS Nanofabrication
AT
IPC
H01L 21/027
H01J 37/302
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