07372025 is referenced by 11 patents and cites 3 patents.

A scanning probe microscope includes a scanning probe tip and an electrostatic surface actuator operatively coupled to the scanning probe tip. The electrostatic surface actuator includes a movable member that has a first surface with a first plurality of electrodes disposed on the first surface and a stationary member that has a second surface with a second plurality of electrodes disposed on the second surface. The first and second surfaces are disposed in a confronting relationship The movable and stationary members are resiliently coupled so that the movable member is capable of being displaced with respect to the stationary member. The first and second pluralities of electrodes are configured to generate electrostatic forces in response to voltages applied. The electrostatic forces laterally displace the movable member in the direction generally parallel to the first and second surfaces. The scanning probe tip is controllably positioned by displacement of the movable member.

Title
Scanning probe microscope using a surface drive actuator to position the scanning tip
Application Number
11/291671
Publication Number
7372025 (B2)
Application Date
November 30, 2005
Publication Date
May 13, 2008
Inventor
John M Neil
Los Altos
CA, US
Storrs T Hoen
Brisbane
CA, US
Assignee
Agilent Technologies
CA, US
IPC
G21K 7/00
G01N 23/00
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