07368927 is referenced by 37 patents and cites 992 patents.

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test. A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.

Title
Probe head having a membrane suspended probe
Application Number
11/175600
Publication Number
7368927 (B2)
Application Date
July 5, 2005
Publication Date
May 6, 2008
Inventor
Victoria Van Syckel
Rhododendron
OR, US
Michael Jolley
Beaverton
OR, US
Kenneth Smith
Portland
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/02
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