07362115 is referenced by 14 patents and cites 958 patents.

An improved chuck assembly with lift pins. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck assembly.

Title
Chuck with integrated wafer support
Application Number
11/655605
Publication Number
7362115 (B2)
Application Date
January 19, 2007
Publication Date
April 22, 2008
Inventor
John Dunklee
Tigard
OR, US
Brad Froemke
Portland
OR, US
Peter Andrews
Beaverton
OR, US
Agent
Chernoff Vilhauer McClung & Stenzel
Assignee
Cascade Microtech
OR, US
IPC
G01R 31/02
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