07345342 is referenced by 196 patents and cites 358 patents.

Various embodiments for improved power devices as well as their methods of manufacture, packaging and circuitry incorporating the same for use in a wide variety of power electronic applications are disclosed. One aspect of the invention combines a number of charge balancing techniques and other techniques for reducing parasitic capacitance to arrive at different embodiments for power devices with improved voltage performance, higher switching speed, and lower on-resistance. Another aspect of the invention provides improved termination structures for low, medium and high voltage devices. Improved methods of fabrication for power devices are provided according to other aspects of the invention. Improvements to specific processing steps, such as formation of trenches, formation of dielectric layers inside trenches, formation of mesa structures and processes for reducing substrate thickness, among others, are presented. According to another aspect of the invention, charge balanced power devices incorporate temperature and current sensing elements such as diodes on the same die. Other aspects of the invention improve equivalent series resistance (ESR) for power devices, incorporate additional circuitry on the same chip as the power device and provide improvements to the packaging of charge balanced power devices.

Title
Power semiconductor devices and methods of manufacture
Application Number
11/26276
Publication Number
7345342 (B2)
Application Date
December 29, 2004
Publication Date
March 18, 2008
Inventor
Christopher B Kocon
Plains
PA, US
Babak S Sani
Oakland
CA, US
Peter H Wilson
Wrightwood
CA, US
Steven P Sapp
Felton
CA, US
Alan Elbanhawy
Hollister
CA, US
Ashok Challa
Sandy
UT, US
Agent
Townsend and Townsend and Crew
Assignee
Fairchild Semiconductor Corporation
ME, US
IPC
H01L 29/78
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