07334630 is referenced by 51 patents and cites 191 patents.

Apparatus and methods according to the present invention utilize micropumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These micropumps are fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These micropumps also can allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the spatial and temporal characteristics of the device temperature profiles. Novel enclosed microchannel structures are also described.

Title
Closed-loop microchannel cooling system
Application Number
11/136793
Publication Number
7334630 (B2)
Application Date
May 25, 2005
Publication Date
February 26, 2008
Inventor
Lian Zhang
Sunnyvale
CA, US
Shulin Zeng
Sunnyvale
CA, US
Evelyn Ning Yi Wang
Stanford
CA, US
Juan G Santiago
Fremont
CA, US
James C Mikkelsen
Los Altos
CA, US
Daniel J Laser
San Francisco
CA, US
Jae Mo Koo
Stanford
CA, US
Thomas W Kenny
San Carlos
CA, US
Linan Jiang
Menlo Park
CA, US
David E Huber
Mountain View
CA, US
Chuan Hua Chen
Stanford
CA, US
Kenneth E Goodson
Belmont
CA, US
Agent
Womble Carlyle Sandridge & Rice PLLC
Assignee
The Board of Trustees of the Leland Stanford Junior University
CA, US
IPC
H05K 7/20
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