07321419 is referenced by 77 patents and cites 178 patents.

A hydrostatic bearing is provided opposite to a wafer on a table. The hydrostatic bearing maintains the distance between the bearing surface and the wafer in the direction of the optical axis of a projection optical system at a predetermined value.

Title
Exposure apparatus, and device manufacturing method
Application Number
11/258846
Publication Number
7321419 (B2)
Application Date
October 27, 2005
Publication Date
January 22, 2008
Inventor
Akimitsu Ebihara
Fukaya
JP
Agent
Oliff & Berridge
Assignee
Nikon Corporation
JP
IPC
G03B 27/52
G03B 27/42
G03B 27/58
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