07319057 is referenced by 6 patents and cites 48 patents.

A lower electrode may be covered by a protective film to reduce the exposure of the lower electrode to subsequent processing steps or the open environment. As a result, materials that may have advantageous properties as lower electrodes may be utilized despite the fact that they may be sensitive to subsequent processing steps or the open environment.

Title
Phase change material memory device
Application Number
10/20757
Publication Number
7319057 (B2)
Application Date
October 30, 2001
Publication Date
January 15, 2008
Inventor
Tyler A Lowrey
San Jose
CA, US
Agent
Trop Pruner & Hu P C
Assignee
Ovonyx
MI, US
IPC
H01L 21/00
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