07302111 is referenced by 30 patents and cites 33 patents.

The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.

Title
Graphics engine for high precision lithography
Application Number
9/954721
Publication Number
7302111 (B2)
Application Date
September 12, 2001
Publication Date
November 27, 2007
Inventor
Per Elmfors
Huddinge
SE
Torbjörn Sandström
Pixbo
SE
Stefan Gustavson
Norrköping
SE
Martin Olsson
Linköping
SE
Agent
Haynes Beffel & Wolfeld
Ernest J Beffel Jr
Assignee
Micronic Laser Systems
SE
IPC
G06K 9/46
G06K 9/36
G06K 9/40
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